Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1987-12-09
1991-01-01
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250305, H01J 3726, H01J 4944
Patent
active
049820915
ABSTRACT:
Electron beam apparatus for use in testing integrated circuits uses a magnetic electron objective lens having a first end adjacent the circuit under test and a second end remote from the circuit. The magnetic field of the lens increases steeply to a maximum near the first end and falls gradually towards the second end. Secondary electrons emitted from the circuit are accelerated strongly by an electrostatic field into the first end of the lens and are retarded abruptly to speeds of the same order as their emission speeds in the region of maximum magnetic field. Further gradual retardation of the electrons takes place so that the electrons approach the second end of the lens parallel to the axis of the lens at substantially their emission speeds. A filter grid located at the second end of the lens and a collector of electrons passing through the filter grid enable the emission speeds of the secondary electrons to be measured.
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Kawamoto, "In-the-Lens-Analyzer", Proceedings of the Symposium on Electron Beam Testing, 9-10 Nov., 1984, pp. 69-72.
Scanning Electron Microscopy/1986/II, Aug., 1986, pp. 465-472.
Journal of Vacuum Science and Technology B., vol. 4, No. 1, Jan./Feb., 1986, "Magnetic Field Extraction of Secondary Electrons for Accurate Integrated Circuit Measurement", Garth et al., pp. 217-220.
Garth Simon C. J.
Sackett John N.
Spicer Denis F.
Anderson Bruce C.
Comfort James T.
Merrett N. Rhys
Sharp Mel
Texas Instruments Incorporated
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