Electron beam apparatus, and inspection instrument and...

Details Electron beam apparatus, and inspection instrument and... Electron beam apparatus, and inspection instrument and...

2005-10-25

2005-10-25

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S397000

Reexamination Certificate

active

06958477

ABSTRACT:
An electron beam apparatus prevents a rapid increase of dosage caused by stoppage or deceleration of movement and protects the specimen when the specimen is irradiated with the electron beam while the specimen and the electron beam are being relatively moved. An electron beam source outputs the electron beam. The dosage of election beam irradiated per unit area of the specimen is measured. A storage section stores a predetermined dosage per unit area in memory for the specimen. A detector detects over exposure of the electron beam when the measured dosage per unit area is greater than the dosage per unit area stored in the storage section. A controller controls the electron beam source to reduce the dosage per unit area of the electron beam lower than the dosage per unit area stored in the storage section.

REFERENCES:
patent: 3916204 (1975-10-01), Swartz
patent: 5182454 (1993-01-01), Matsuda et al.
patent: 5933217 (1999-08-01), Nakasuji et al.
patent: 5955738 (1999-09-01), Manabe et al.
patent: 6184526 (2001-02-01), Kohama et al.
patent: 6479819 (2002-11-01), Hamashima et al.
patent: 6518582 (2003-02-01), Kohama
patent: 6677587 (2004-01-01), Kohama
patent: 2002/0117635 (2002-08-01), Shinada et al.
patent: 2002/0148975 (2002-10-01), Kimba et al.
patent: 7-249393 (1995-09-01), None
patent: 10-197462 (1998-07-01), None
patent: 10-294345 (1998-11-01), None

Affiliated with

Also associated with

Rating

Electron beam apparatus, and inspection instrument and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam apparatus, and inspection instrument and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam apparatus, and inspection instrument and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3459537