Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

1981-11-19

1984-02-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250356ML, H01J 2970, G01N 2300

Patent

active

044319150

ABSTRACT:
An upper deflection coil comprising a toroidal coil. A lower deflection coil comprising a saddle-shaped coil to minimize the combined inductance of the upper and lower deflection coils. A single scanning signal generator which supplies the deflection coils with scanning signals having different frequencies, ranging from low scanning speeds to television scanning speeds. Thus, no image shift occurs when changing scanning speeds in between television scanning speeds and other scanning speeds.

REFERENCES:
patent: 3911321 (1975-10-01), Wardly
patent: 4330709 (1982-05-01), de Chambost
"Design Study of Toroidal Deflection Yokes with Eddy-Current Compensation", Wordly, Journ. of Applied Phy., vol. 45, No. 5, May 1974, pp. 2310-2320.

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