Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

1992-10-20

1994-08-09

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250311, H01J 37295

Patent

active

053368851

ABSTRACT:
An electron beam apparatus is provided with an energy selective device which enables spectrometric measurements together with imaging. The energy selective device has its main electron beam trajectory in a plane outside the optical axis of the electron beam apparatus, thereby substantially reducing the overall length of the apparatus. Preferably the energy selective device has double symmetry such that the energy dispersion has a maximum value in a central plane of symmetry where a selective slit can be introduced. Full symmetry facilitates full compensation of optical aberrations in the device. Adding quadruples in a second plane of symmetry enables imaging of spectra at a location outside the device.

REFERENCES:
patent: 3863069 (1975-01-01), Shirota
patent: 4740704 (1988-04-01), Rose et al.
patent: 4812652 (1989-03-01), Egle et al.
patent: 5097126 (1992-03-01), Krivanek
patent: 5126565 (1992-06-01), Rose et al.
patent: 5177361 (1993-01-01), Krahl et al.
Degenhardt and Rose, "A compact abberation-free imaging filter with inside energy selection", Nuclear Instrumentation and Methods in Physics Research, A298, 1990, No. 1, pp. 171-178.

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