Electromechanical transducer and method of fabricating the same

Details Electromechanical transducer and method of fabricating the same Electromechanical transducer and method of fabricating the same

2006-03-16

2008-12-09

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S716000, C073S720000

Reexamination Certificate

active

07461559

ABSTRACT:
A weight part (12) is supported by a beam part (26) in a slim piece shape supported by a frame-shaped support part (10), and the beam part (26) is provided with a piezoresistance element (20) as a transducing element that transduces a mechanical variation to an electrical variation, so that a mechanical variation of the weight part (12) is transmitted to the piezoresistance element (20) via the beam part (26). Then, the beam part (26) is constructed by stacking the silicon nitride film (16) and a resin film (18) such as a polyimide film.

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