Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2004-08-18
2008-12-30
Rosasco, Stephen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C716S030000
Reexamination Certificate
active
07470489
ABSTRACT:
A method of designing an alternating phase shifting mask for projecting an image of an integrated circuit design having a plurality of spaced segments of critical dimension. The method initially identifies a phase universe boundary, such that the phase universe comprises a contiguous region of the integrated circuit layout wherein critical dimension segments within the phase universe are beyond a maximum phase interaction distance from any critical dimension segments outside the phase universe in accordance with predetermined design rules. The method then divides the phase universe into phase regions separated by the integrated circuit layout and any extensions of the critical dimension segments so that the phase regions are binary colorable within the phase universe.
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Fonseca Carlos A
Liebmann Lars W
C. Li Todd M.
DeLio & Peterson LLC
International Business Machines - Corporation
Nowak Kelly M.
Rosasco Stephen
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