Electromechanical switch

Details Electromechanical switch Electromechanical switch

2005-10-18

2010-11-30

Potter, Roy K (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S414000, C257SE29166

Reexamination Certificate

active

07843023

ABSTRACT:
An electromechanical filter of the present invention is an electromechanical switch formed on a substrate. The switch has a fixed electrode which is to become a signal transmission line, and a movable electrode formed in a levitating manner while being spaced from the fixed electrode with a gap therebetween. An insulating film is provided on the fixed electrode, and an actuator is formed around the movable electrode formed on a post section. Thereby, an electromechanical switch equipped with a movable electrode fixing mechanism which prevents occurrence of self-actuation, which has hitherto been difficult to realize, is materialized.

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Chinese Office Action Issued Jun. 5, 2009.

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