Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-08-30
2008-11-11
Pert, Evan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S419000, C359S230000
Reexamination Certificate
active
07449759
ABSTRACT:
An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The curved deformation of flexible membranes causes their MEMS behavior to deviate from known interactions between rigid plates that maintain geometric parallelism during ponderomotive actuation. The present invention teaches three methods for reacquiring parallel plate behavior: superaddition or in situ integration of a rigid region within or upon the deformable MEMS membrane; creation of isodyne regions to secure parallelism by altering the force profile upon the membrane by introducing tuned and shaped voids within the conductive region associated with the membrane; and a hybrid composite approach wherein the conductive region is deposited after deposition of a raised rigid zone, thereby emulating isodyne behavior due to the increased inter-conductor distance in the vicinity of the rigid zone, in conjunction with rigidity benefits stemming directly from said zone.
REFERENCES:
patent: 5999307 (1999-12-01), Whitehead et al.
patent: 6307663 (2001-10-01), Kowarz
patent: 1403055 (2004-03-01), None
King Carey
Selbrede Martin G.
Van Ostrand Dan
Fish & Richardson P.C.
Kordzik Kelly K.
Pert Evan
Tran Tan
Uni-Pixel Displays, Inc.
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