Electromagnetic alignment and scanning apparatus

Details Electromagnetic alignment and scanning apparatus Electromagnetic alignment and scanning apparatus

2005-01-18

2005-01-18

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S597000, C318S676000

Reexamination Certificate

active

06844696

ABSTRACT:
An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the stage in the direction of the long linear motion. The VCM provides an electromagnetic force to move the stage for small displacements in the plane in a linear direction perpendicular to the direction of the long linear motion to ensure proper alignment. One element of the linear commutated motors is mounted on a freely suspended drive assembly frame which is moved by a reaction force to maintain the center of gravity of the apparatus. Where one linear motor is utilized, yaw correction can be achieved utilizing two VCMs.

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