Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1981-11-10
1982-11-30
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430314, 430315, 430323, 430324, 204 29, 204 38E, 204 38R, 20412965, G03C 500
Patent
active
043616410
ABSTRACT:
The surface of an electrically conductive substrate is electrolytically modulated to a predetermined profile by subjecting the surface to electrodeposition or electrodissolution through ionically conductive body portions of an ionic conductance resist which masks the surface. The rate of passage of ionic species to or from any given point along the masked surface is controlled by the trans-resist ionic conductance or resistance at that point. The predetermined surface profile is generated by providing the resist with a trans-resist ionic conductance or resistance profile which patterns the predetermined surface profile.
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Angus John C.
Landau Uziel
Tomaswick Kathleen M.
Alpert A. Sidney
Dees Jos,e G.
Kittle John E.
Koffsky David N.
Teplitz Jerome M.
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