Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2004-01-30
2008-05-20
Wilkins, III, Harry D (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
Reexamination Certificate
active
07374646
ABSTRACT:
The present invention provides an electrolytic processing apparatus which is capable of increasing an in-plane uniformity of a film thickness of a plated film by making more uniform an electric field distribution over an entire surface to be processed of a substrate even if the substrate has a large area, and controlling more uniformly a speed, over the entire surface to be processed of the substrate. The electrolytic processing apparatus of this invention includes: a substrate holder for holding a substrate, a first electrode for being brought into contact with the substrate to supply current to a surface, to be processed, of the substrate; a second electrode disposed substantially parallel to the surface, to be processed, of the substrate in a position facing the surface, to be processed, of the substrate held by the substrate holder; a high resistance structure disposed between the substrate held by the substrate holder and the second electrode; an electrolytic solution introducing portion for introducing an electrolytic solution into a region across which the substrate held by the substrate holder and the high resistance structure face each other, from laterally of the high resistance structure; and a power source for applying a voltage between the first electrode and the second electrode.
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Ide Kunihito
Kanda Hiroyuki
Katsuoka Seiji
Makino Natsuki
Mihara Naoki
Ebara Corporation
Wenderoth , Lind & Ponack, L.L.P.
Wilkins, III Harry D
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