Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2003-01-31
2010-02-02
Wilkins, III, Harry D. (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C205S640000, C205S096000
Reexamination Certificate
active
07655118
ABSTRACT:
This invention relates to an electrolytic processing apparatus and method useful for processing a conductive material formed in the surface of a substrate, or for removing impurities adhering to the surface of a substrate. An electrolytic processing apparatus, including, a processing electrode that can come close to a workpiece, a feeding electrode for feeding electricity to the workpiece, an ion exchanger disposed in the space between the workpiece and the processing and the feeding electrodes, a fluid supply section for supplying a fluid between the workpiece and the ion exchanger, and a power source. The processing electrode and/or the feeding electrode is electrically divided into a plurality of parts, and the power source applies a voltage to each of the divided electrode parts and can control voltage and/or electric current independently for each of the divided electrode parts.
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Co-pending U.S. Appl. No. 10/669,468, entitled “Electrolytic Processing Apparatus and Electrolytic Processing Method”.
European Office Action issued Dec. 8, 2008 in the corresponding European application.
Kobata Itsuki
Kumekawa Masayuki
Nabeya Osamu
Shirakashi Mitsuhiko
Yasuda Hozumi
Ebara Corporation
Smith Nicholas A.
Wenderoth , Lind & Ponack, L.L.P.
Wilkins, III Harry D.
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