Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1979-05-25
1980-12-23
Smith, John D.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
148 333, 29574, 324158D, 361433, 427 82, 427 84, 357 66, H01L 2166
Patent
active
042411670
ABSTRACT:
A liquid barrier contact to InP made of 40% tartatic acid and 30% hydrogen peroxide in a 3:1 ratio by volume is used for capacitance-voltage carrier profiling to large voltages (>10 V) on relatively heavily doped material (>10.sup.17 CM.sup.-3) and at room temperature.
REFERENCES:
patent: 2623102 (1952-12-01), Shockley
patent: 2627545 (1953-02-01), Muss et al.
patent: 3701930 (1972-10-01), Tami
patent: 3858304 (1975-01-01), Leedy
patent: 3977015 (1976-08-01), Irving et al.
Miller, "A Feedback Method for Investigating Carrier Distributions in Semnductors," IEEE Transactions on Electron Devices, vol. ED-19, No. 10, Oct. 1972.
Collins David A.
Lile Derek L.
Johnston Ervin F.
Phillips Thomas M.
Sciascia Richard S.
Smith John D.
The United States of America as represented by the Secretary of
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