Electrolyte with good planarization capability, high removal...

Details Electrolyte with good planarization capability, high removal... Electrolyte with good planarization capability, high removal...

2005-03-08

2005-03-08

Ryan, Patrick (Department: 1745)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

Electrolyte composition or defined electrolyte

C205S682000, C252S079100

Reexamination Certificate

active

06863797

ABSTRACT:
Electrolyte compositions and methods for planarizing a surface of a substrate using the electrolyte compositions are provided. In one aspect, an electrolyte composition includes one or more chelating agents, one or more corrosion inhibitors, and one or more pH adjusting agents. In another aspect, an electrolyte composition includes one or more chelating agents, two or more corrosion inhibitors, and one or more pH adjusting agents. In another aspect, an electrolyte composition includes one or more chelating agents, one or more corrosion inhibitors, one or more pH adjusting agents, and one or more electrically resistive additives.

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