Electrolyte retaining on a rotating platen by directional...

Details Electrolyte retaining on a rotating platen by directional... Electrolyte retaining on a rotating platen by directional...

2008-10-07

2010-10-19

Wilkins, III, Harry D. (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With mechanical abrasion or grinding

C205S670000, C205S671000, C205S672000, C451S028000, C451S082000

Reexamination Certificate

active

07815787

ABSTRACT:
A method and apparatus for retaining electrolyte on a rotating platen using directional air flow is provided. In one embodiment, an apparatus for processing a substrate is provided. The apparatus includes a platen assembly having a surface for supporting a processing pad and disposed on a stationary base so that the platen assembly may rotate relative to the base; and an air knife coupled to the base and extended over a portion of the surface, the air knife operable to deliver a stream of air toward the pad to divert at least a portion of a fluid disposed on the pad toward a center of the pad.

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