Electroluminescence device with nanotip diodes

Semiconductor device manufacturing: process – Electron emitter manufacture

Reexamination Certificate

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C438S713000, C977S834000

Reexamination Certificate

active

11090386

ABSTRACT:
A nanotip electroluminescence (EL) diode and a method are provided for fabricating said device. The method comprises: forming a plurality of Si nanotip diodes; forming a phosphor layer overlying the nanotip diode; and, forming a top electrode overlying the phosphor layer. The nanotip diodes are formed by: forming a Si substrate with a top surface; forming a Si p-well; forming an n+ layer of Si, having a thickness in the range of 30 to 300 nanometers (nm) overlying the Si p-well; forming a reactive ion etching (RIE)-induced polymer grass overlying the substrate top surface; using the RIE-induced polymer grass as a mask, etching areas of the substrate not covered by the mask; and, forming the nanotip diodes in areas of the substrate covered by the mask.

REFERENCES:
patent: 5399185 (1995-03-01), Berthold et al.
patent: 5667905 (1997-09-01), Campisano et al.
patent: 6218771 (2001-04-01), Berishev et al.
patent: 6579735 (2003-06-01), Romano et al.
patent: 2004/0056271 (2004-03-01), Chen et al.
patent: 2006/0181197 (2006-08-01), Nago et al.
J. Ruan, et al, Optical Amplification in Nanocrystalline Silicon Superlattices, MRS 2002.
J. Ruan, et al, “Stimulated emission in nanocrystalline silicon Superlattices” APL 83, #26, p. 1-3, 2003.
A. Polman, J. Appl. Phys. 82 (1), Jul. 1997, p. 1-39.
H, Manohara, “A new method for fabricating random silicon nanotips” NanotechBriefs, Mar. 2004.

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