Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Reexamination Certificate
2011-03-29
2011-03-29
Edwards, Laura (Department: 1713)
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
C118S422000, C118S429000, C260S66500B
Reexamination Certificate
active
07913644
ABSTRACT:
An electroless deposition system includes a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.
REFERENCES:
patent: 3753768 (1973-08-01), Ichiki et al.
patent: 6165912 (2000-12-01), McConnell et al.
patent: 6713377 (2004-03-01), Lee et al.
patent: 6902605 (2005-06-01), Kolics et al.
patent: 2002/0130441 (2002-09-01), Robinson et al.
patent: 2003/0219976 (2003-11-01), Gleason
patent: 2005/0136193 (2005-06-01), Weidman et al.
patent: WO 99/57340 (1999-11-01), None
Gilbert Nancy E.
Kolics Artur
Kulkarni Shashank Ravindra
Rulkens Ron
Tas Robert D.
Edwards Laura
Lam Research Corporation
Martine & Penilla & Gencarella LLP
LandOfFree
Electroless deposition system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electroless deposition system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electroless deposition system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2696796