Compositions: coating or plastic – Coating or plastic compositions – Metal-depositing composition or substrate-sensitizing...
Reexamination Certificate
2011-08-02
2011-08-02
Klemanski, Helene (Department: 1734)
Compositions: coating or plastic
Coating or plastic compositions
Metal-depositing composition or substrate-sensitizing...
C106S001220, C427S437000
Reexamination Certificate
active
07988774
ABSTRACT:
Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
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Jagminiene Aldona
Norkus Eugenijus
Stankeviciene Ina
Vaskelis Algirdas
Klemanski Helene
Lam Research Corporation
Schwegman Lundberg & Woessner, P.A.
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