Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-05-10
2005-05-10
Tran, Minhloan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C359S212100, C359S223100, C359S224200, C359S225100
Reexamination Certificate
active
06891240
ABSTRACT:
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
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DeBruyker Dirk
Dunec John L.
Hantschel Thomas
Peeters Eric
Rosa Michel A.
Chen Kent
Tran Minhloan
Tran Tan
Xerox Corporation
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