Electro-hydrodynamic micro-pump and method of operating the...

Details Electro-hydrodynamic micro-pump and method of operating the... Electro-hydrodynamic micro-pump and method of operating the...

2011-02-15

2011-02-15

Kramer, Devon C (Department: 3746)

Pumps

Electrical or getter type

Reexamination Certificate

active

07887301

ABSTRACT:
Provided is an electrohydrodynamic (EHD) micro-pump and a method of operating the same. The EHD micro-pump includes a plurality of electrodes alternately disposed on a substrate, an insulating layer covering the electrodes on the substrate, a carbon nanotube (CNT) layer formed on the insulating layer, a cover that forms a chamber with the substrate to accommodate the plurality of electrodes on the substrate where the cover includes a fluid inlet and a fluid outlet, an upper electrode formed on an inner surface of the cover facing the plurality of electrodes, and a power supplier that applies a voltage to the plurality of electrodes.

REFERENCES:
patent: 6007309 (1999-12-01), Hartley
patent: 7505110 (2009-03-01), Furukawa et al.
patent: 7758316 (2010-07-01), Bonne et al.
patent: 2006/0232180 (2006-10-01), Kang et al.
Richter et al., entitledAn Electrohydrodynamic Micropump, CH2832-4/90/0000-0099, IEEE, published in 1990, pp. 99-104.
Moesner et al., entitledElectrohydrodynamic Motor for Tiny Vessels, Proceedings of Advanced Intelligent Mechatronics, IEEE, published in 1997.

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