Electro hydrodynamic method for the preparation of a thin semico

Details Electro hydrodynamic method for the preparation of a thin semico Electro hydrodynamic method for the preparation of a thin semico

1986-10-14

1988-09-13

Pal, Asok

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156609, 156614, 156615, 156DIG89, 164463, 1641221, 164466, C30B 2300

Patent

active

047707380

ABSTRACT:
A method of preparing a thin film of a semiconductor material on a substrate, in which charged microdroplets of the semiconductor material or a constituent thereof are generated by electrohydrodynamic (EHD) extraction of the droplets from a meniscus forced at an elongate tip of a nozzle containing the material in a molten state, the EHD extraction occurring under the influcence of a high electric field produced by an extractor electrode adjacent the tip of the nozzle. The microdroplets are then accelerated away from the elongate tip of the nozzle to form a two-dimensional ribbon-like beam or blanket of the charged microdroplets. The two-dimensional beam is directed onto the trailing edge of a target carried on a moving substrate such that a film of the semiconductor material is formed on the substrate by deposition of the microdroplets on the trailing edge of the moving target.

REFERENCES:
Directional Growth of Single-Crystal Silicon Films Across Silicon Carbide by a Moving Deposition-Zone Technique by R. L. Tallman et al., in Solid-State Electronics, 1966, Vol. 9, pp. 327-330.
Electrohydrodynamic Ion Source, by John F. Mahoney et al., in Journal of Applied Physics, vol. 40, No. 13, Dec. 1969.
Research and Development of a Charged-Particle Biopolar Thruster, by Julius Perel et al., in AIAA Journal, vol. 7, No. 3, Mar. 1969, pp. 507-511.

Affiliated with

Also associated with

Rating

Electro hydrodynamic method for the preparation of a thin semico does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electro hydrodynamic method for the preparation of a thin semico, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electro hydrodynamic method for the preparation of a thin semico will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-805297