Electrically programmable fuse and fabrication method

Details Electrically programmable fuse and fabrication method Electrically programmable fuse and fabrication method

2011-08-23

2011-08-23

Sefer, A. (Department: 2893)

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

Having fuse or integral short

C438S132000, C438S215000, C257S529000, C257SE23149, C257SE21592

Reexamination Certificate

active

08003474

ABSTRACT:
An electrically programmable fuse includes an anode, a cathode, and a fuse link conductively connecting the cathode with the anode, which is programmable by applying a programming current. The anode and the fuse link each include a polysilicon layer and a silicide layer formed on the polysilicon layer, and the cathode includes the polysilicon layer and a partial silicide layer formed on a predetermined portion of the polysilicon layer of the cathode located adjacent to a cathode junction where the cathode and the fuse link meet.

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