Electrically erasable programmable read-only memory cell and...

Details Electrically erasable programmable read-only memory cell and... Electrically erasable programmable read-only memory cell and...

2008-07-29

2008-07-29

Chen, Jack (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

Reexamination Certificate

active

11562918

ABSTRACT:
A manufacturing method and a device of an EEPROM cell are provided. The method includes the following steps. First, a tunnel layer and an inter-gate dielectric layer are formed over a surface of a substrate respectively, and a doped region is formed in the substrate under the inter-gate dielectric layer and used as a control gate. Thereafter, a floating gate is formed over the inter-gate dielectric layer and the tunnel layer. Thereafter, a source region and a drain region are formed in the substrate beside two sides of the floating gate under the tunnel layer. Especially, the manufacturing method of the memory cell can be integrated with the manufacturing process of high operation voltage component and low operation voltage component.

REFERENCES:
patent: 5936276 (1999-08-01), Maurelli et al.

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