Static information storage and retrieval – Systems using particular element – Capacitors
Patent
1990-11-08
1992-09-08
Fears, Terrell W.
Static information storage and retrieval
Systems using particular element
Capacitors
365185, 357 236, G11C 1300, G11C 1124
Patent
active
051464268
ABSTRACT:
An Erasable and Programmable Read Only Memory (EEPROM) cell is provided with an insulated control gate and an insulating floating gate formed in a trench in a semiconductor body. A surface-adjoining drain region is provided alongside an upper portion of a sidewall of the trench, while a source region is provided alongside a lower portion of the trench sidewall, with a channel region extending along the sidewall of the trench between the source and drain regions. The EEPROM cell is programmed by hot electron injection through the sidewall of the trench alongside the channel region, and is erased by Fowler Nordhiem tunneling through a corner region in the bottom of the trench by creating a localized high electric field density in the corner region. In this manner, a highly compact, efficient and durable EEPROM cell is obtained.
REFERENCES:
patent: Re33261 (1990-07-01), Baglee
Kuo Di-Son
Mukherjee Satyendranath
Tsou Len-Yuan
Biren Steven R.
Fears Terrell W.
North American Philips Corp.
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