Electrically conductive resist material, a process for its prepa

Details Electrically conductive resist material, a process for its prepa Electrically conductive resist material, a process for its prepa

1990-02-02

1992-08-11

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430296, 430311, 522112, 522118, 522119, 522127, 522142, 522146, 526256, G03C 173

Patent

active

051377993

ABSTRACT:
An electrically conductive resist material is disclosed, comprising at least one polymer which is sensitive to ionizing radiation and a soluble electrically conductive oligomer or polymer. A process for producing the resist material is also described, comprising admixing an electrically conductive oligomer or polymer dissolved in a solvent to at least one polymer which is sensitive to ionizing radiation. The resist material is useful in preparing electron beam resists which prevent electrostatic charging and resultant electrostatic fields.

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Patent Abstracts of Japan, vol. 11, No. 331, of JP-A-62 113139 dated May 25, 1987.

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