Electrical test structure and method for space and line measurem

Details Electrical test structure and method for space and line measurem Electrical test structure and method for space and line measurem

1995-01-04

1996-09-03

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

3241581, 324699, 324716, G01R 3126

Patent

active

055527183

ABSTRACT:
This describes a test pattern and method for measuring dimensional characteristics of features formed on a surface. This is realized and provided by forming a space, defined by the feature, in intersecting relationship with a pair of conductive lines of a test pattern configuration such that the lines are altered at the intersection with the space in accordance with the dimensions of that space, measuring the resistance of at least one of the lines in a region remote from the intersection with the space and the resistance of each line in the region of its intersection with the space, and comparing the resistance of the remote region with the resistances for the region of each of the lines where they intersect the space to thereby establish the position of, and at least one dimension of that space. A test structure wherein the spaced lines intersect the longitudinal ends of the space is utilized for determining the length and the longitudinal position of the space, and a test structure where lines intersect the lateral edges of the space is utilized for determining the width of and the lateral position of the space. For measuring the dimensional characteristics of a line feature, the above noted patterns are utilized, after first replicating the line as a space.

REFERENCES:
patent: 3650020 (1972-03-01), Mar
patent: 3974443 (1976-08-01), Thomas
patent: 4347479 (1982-08-01), Cullet
patent: 4516071 (1985-05-01), Buehler
patent: 4871962 (1989-10-01), Cheung
patent: 4956611 (1990-09-01), Maltiel
patent: 4978923 (1990-12-01), Maltiel
patent: 5082792 (1992-01-01), Pasch et al.
"Pattern and Structure for Measuring electrically Both lines and Spaces of an Insulator" IBM Technical DIsclosure Bulletin vol. 32; No. 12; May 1990; pp. 240-241.

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