Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2007-02-27
2007-02-27
Hirshfeld, Andrew H. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C324S713000, C324S765010, C438S014000, C438S018000, C257S048000
Reexamination Certificate
active
10944625
ABSTRACT:
An apparatus for measuring alignment of polysilicon shapes to a silicon area. Each polysilicon shape in a first plurality of polysilicon shapes has a bridging vertex positioned near the silicon area. Each polysilicon shape in a second plurality of polysilicon shapes has a bridging vertex positioned near the silicon area. The second plurality of silicon shapes is positioned on the opposite side of the silicon area from the first plurality of silicon shapes. An electrical measurement of how many of the polysilicon shapes in the first plurality of polysilicon shapes and in the second plurality of polysilicon shapes provides a measurement of alignment of the polysilicon shapes and the silicon area.
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Donze Richard Lee
Erickson Karl Robert
Hovis William Paul
Sheets, II John Edward
Tetzloff Jon Robert
He Amy
Hirshfeld Andrew H.
International Business Machines - Corporation
Williams Robert R.
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