Electrical fuse and method of making

Details Electrical fuse and method of making Electrical fuse and method of making

2006-10-19

2009-02-17

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

C438S281000, C438S601000, C257SE23149

Reexamination Certificate

active

07491585

ABSTRACT:
A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.

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