Electrical fuse and method of making

Details Electrical fuse and method of making Electrical fuse and method of making

2011-01-11

2011-01-11

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

C438S215000, C438S281000, C438S333000, C438S601000, C257SE23149

Reexamination Certificate

active

07867832

ABSTRACT:
A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.

REFERENCES:
patent: 4536948 (1985-08-01), Te Velde et al.
patent: 5789795 (1998-08-01), Sanchez et al.
patent: 5955380 (1999-09-01), Lee
patent: 6124194 (2000-09-01), Shao et al.
patent: 6251710 (2001-06-01), Radens et al.
patent: 6335228 (2002-01-01), Fuller et al.
patent: 6555458 (2003-04-01), Yu
patent: 6563188 (2003-05-01), Nagatani
patent: 6638845 (2003-10-01), Kagiwata
patent: 6734525 (2004-05-01), Chou et al.
patent: 6806107 (2004-10-01), Wu
patent: 6879018 (2005-04-01), Marr et al.
patent: 6956783 (2005-10-01), Ikuta et al.
patent: 2001/0004549 (2001-06-01), Arndt et al.
patent: 2001/0031516 (2001-10-01), Bouldin et al.
patent: 2003/0030124 (2003-02-01), Nagatani
patent: 2003/0116820 (2003-06-01), Daubenspeck et al.
patent: 2003/0119293 (2003-06-01), Bae
patent: 2003/0141568 (2003-07-01), Sato et al.
patent: 2004/0209404 (2004-10-01), Wang et al.
patent: 2004/0224431 (2004-11-01), Wu
patent: 2005/0077594 (2005-04-01), Matsunaga et al.
patent: 2005/0078500 (2005-04-01), Poechmueller
patent: 2006/0258122 (2006-11-01), Whitefield et al.
patent: 2007/0007621 (2007-01-01), Omura et al.
patent: 2007/0210412 (2007-09-01), Booth et al.
patent: 2007/0210414 (2007-09-01), Iwamoto et al.
patent: 2007/0247273 (2007-10-01), Booth et al.
patent: 2008/0093703 (2008-04-01), Yang et al.
Notice of Allowance in U.S. Appl. No. 11/550,943, Oct. 2008.

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