Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-10-23
2007-10-23
King, Roy V. (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S22400M, C204S286100, C204S287000, C205S096000
Reexamination Certificate
active
10877137
ABSTRACT:
A method and apparatus for an electrochemical processing cell that is configured to minimize bevel and backside deposition. The apparatus includes a contact ring assembly for supporting a substrate, a thrust plate movably positioned to engage a substrate positioned on the contact pins, and a lip seal member positioned to contact the thrust plate and the contact ring to prevent fluid flow therebetween. The lip seal includes at least one bubble release channel formed therethrough. The method includes positioning an electric field barrier between a backside substrate engaging member and a frontside substrate supporting member to prevent electric field from traveling to the bevel and backside of the substrate. The electric field barrier including at least one bubble release channel formed therethrough.
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Semitool Pr
Herchen Harald
Lubomirsky Dmitry
Pang Lily L.
Zheng Bo
Applied Materials Inc.
King Roy V.
Patterson & Sheridan LLP
Smith Nicholas A.
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