Electric charged particle beam microscopy and electric...

Details Electric charged particle beam microscopy and electric... Electric charged particle beam microscopy and electric...

2007-07-05

2009-12-15

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S252100

Reexamination Certificate

active

07633064

ABSTRACT:
An electric charged particle beam microscope measures a geometric distortion at an arbitrary magnification with high precision, and corrects the geometric distortion. A geometric distortion at a first magnification is measured as an absolute distortion based on a standard specimen having a cyclic structure. A microscopic structure specimen is photographed at a geometric distortion measured first magnification and at a geometric distortion unmeasured second magnification. The image at the first magnification is equally transformed to the second magnification to generate a scaled image. The geometric distortion at the second magnification is measured as a relative distortion based on the scaled image. The absolute distortion at the second magnification is obtained on the basis of the absolute distortion at the first magnification and the relative distortion at the second magnification. Subsequently, the second magnification is replaced with the first magnification, and the relative distortion measurement is repeated.

REFERENCES:
patent: 6486472 (2002-11-01), Gunji et al.
patent: 6509564 (2003-01-01), Suzuki et al.
patent: 6570157 (2003-05-01), Singh et al.
patent: 7361941 (2008-04-01), Lorusso et al.
patent: 7372051 (2008-05-01), Tsuneta et al.
patent: 7435957 (2008-10-01), Inada et al.
patent: 2006/0038125 (2006-02-01), Tsuneta et al.
patent: 2000-40481 (2000-02-01), None
patent: 2002-184336 (2002-06-01), None
patent: 2003-022773 (2003-01-01), None
patent: 2006-58210 (2006-03-01), None

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