Electric charged particle beam microscope and microscopy

Details Electric charged particle beam microscope and microscopy Electric charged particle beam microscope and microscopy

2011-01-04

2011-01-04

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S3960ML, C250S397000, C250S398000

Reexamination Certificate

active

07863564

ABSTRACT:
An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.

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