Efficient pitch multiplication process

Details Efficient pitch multiplication process Efficient pitch multiplication process

2006-09-14

2010-02-23

Huff, Mark F (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S394000, C430S312000, C430S316000, C430S323000, C430S324000

Reexamination Certificate

active

07666578

ABSTRACT:
Pitch multiplied and non-pitch multiplied features of an integrated circuit, e.g., features in the array, interface and periphery areas of the integrated circuit, are formed by processing a substrate through a mask. The mask is formed by patterning a photoresist layer which simultaneously defines mask elements corresponding to features in the array, interface and periphery areas of the integrated circuit. The pattern is transferred to an amorphous carbon layer. Sidewall spacers are formed on the sidewalls of the patterned amorphous carbon layer. A layer of protective material is deposited and then patterned to expose mask elements in the array region and in selected parts of the interface or periphery areas. Amorphous carbon in the array region or other exposed parts is removed, thereby leaving a pattern including free-standing, pitch multiplied spacers in the array region. The protective material is removed, leaving a pattern of pitch multiplied spacers in the array region and non-pitch multiplied mask elements in the interface and periphery areas. The pattern is transferred to a hard mask layer, through which an underlying substrate is etched.

REFERENCES:
patent: 4234362 (1980-11-01), Riseman
patent: 4419809 (1983-12-01), Riseman et al.
patent: 4432132 (1984-02-01), Kinsbron et al.
patent: 4502914 (1985-03-01), Trumpp et al.
patent: 4508579 (1985-04-01), Goth et al.
patent: 4648937 (1987-03-01), Ogura et al.
patent: 4716131 (1987-12-01), Okazawa et al.
patent: 4776922 (1988-10-01), Bhattascharyya et al.
patent: 4838991 (1989-06-01), Cote et al.
patent: 5013680 (1991-05-01), Lowrey et al.
patent: 5047117 (1991-09-01), Roberts
patent: 5053105 (1991-10-01), Fox, III
patent: 5117027 (1992-05-01), Bernhardt et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330879 (1994-07-01), Dennison
patent: 5470661 (1995-11-01), Bailey et al.
patent: 5514885 (1996-05-01), Myrick
patent: 5670794 (1997-09-01), Manning
patent: 5753546 (1998-05-01), Koh et al.
patent: 5789320 (1998-08-01), Andricacos et al.
patent: 5795830 (1998-08-01), Cronin et al.
patent: 5830332 (1998-11-01), Babich et al.
patent: 5899746 (1999-05-01), Mukai
patent: 5998256 (1999-12-01), Juengling
patent: 6004862 (1999-12-01), Kim et al.
patent: 6010946 (2000-01-01), Hisamune et al.
patent: 6042998 (2000-03-01), Brueck et al.
patent: 6057573 (2000-05-01), Kirsch et al.
patent: 6063688 (2000-05-01), Doyle et al.
patent: 6071789 (2000-06-01), Yang et al.
patent: 6110837 (2000-08-01), Linliu et al.
patent: 6143476 (2000-11-01), Ye et al.
patent: 6211044 (2001-04-01), Xiang et al.
patent: 6288454 (2001-09-01), Allman et al.
patent: 6291334 (2001-09-01), Somekh
patent: 6297554 (2001-10-01), Lin
patent: 6335257 (2002-01-01), Tseng
patent: 6348380 (2002-02-01), Weimer et al.
patent: 6362057 (2002-03-01), Taylor, Jr. et al.
patent: 6383907 (2002-05-01), Hasegawa et al.
patent: 6395613 (2002-05-01), Juengling
patent: 6423474 (2002-07-01), Holscher
patent: 6455372 (2002-09-01), Weimer
patent: 6500756 (2002-12-01), Bell et al.
patent: 6514884 (2003-02-01), Maeda
patent: 6522584 (2003-02-01), Chen et al.
patent: 6534243 (2003-03-01), Templeton
patent: 6548396 (2003-04-01), Naik et al.
patent: 6559017 (2003-05-01), Brown et al.
patent: 6566280 (2003-05-01), Meagley et al.
patent: 6573030 (2003-06-01), Fairbairn et al.
patent: 6602779 (2003-08-01), Li et al.
patent: 6632741 (2003-10-01), Clevenger et al.
patent: 6638441 (2003-10-01), Chang et al.
patent: 6667237 (2003-12-01), Metzler
patent: 6673684 (2004-01-01), Huang et al.
patent: 6686245 (2004-02-01), Mathew et al.
patent: 6689695 (2004-02-01), Lui et al.
patent: 6706571 (2004-03-01), Yu et al.
patent: 6709807 (2004-03-01), Hallock et al.
patent: 6734107 (2004-05-01), Lai et al.
patent: 6744094 (2004-06-01), Forbes
patent: 6773998 (2004-08-01), Fisher et al.
patent: 6794699 (2004-09-01), Bissey et al.
patent: 6800930 (2004-10-01), Jackson et al.
patent: 6835662 (2004-12-01), Erhardt et al.
patent: 6867116 (2005-03-01), Chung
patent: 6875703 (2005-04-01), Furukawa et al.
patent: 6893972 (2005-05-01), Rottstegge et al.
patent: 6924191 (2005-08-01), Liu et al.
patent: 6962867 (2005-11-01), Jackson et al.
patent: 7015124 (2006-03-01), Fisher et al.
patent: 7074668 (2006-07-01), Park et al.
patent: 7115525 (2006-10-01), Abatchev et al.
patent: 7183205 (2007-02-01), Hong
patent: 7183597 (2007-02-01), Doyle
patent: 7208379 (2007-04-01), Venugopal et al.
patent: 7288445 (2007-10-01), Bryant et al.
patent: 7291560 (2007-11-01), Parascandola et al.
patent: 2002/0042198 (2002-04-01), Bjarnason et al.
patent: 2002/0045308 (2002-04-01), Juengling
patent: 2002/0063110 (2002-05-01), Cantell et al.
patent: 2002/0068243 (2002-06-01), Hwang et al.
patent: 2002/0127810 (2002-09-01), Nakamura et al.
patent: 2003/0006410 (2003-01-01), Doyle
patent: 2003/0044722 (2003-03-01), Hsu et al.
patent: 2003/0109102 (2003-06-01), Kujirai et al.
patent: 2003/0119307 (2003-06-01), Bekiaris et al.
patent: 2003/0127426 (2003-07-01), Chang et al.
patent: 2003/0157436 (2003-08-01), Manger et al.
patent: 2003/0207207 (2003-11-01), Li
patent: 2003/0207584 (2003-11-01), Sivakumar et al.
patent: 2003/0215978 (2003-11-01), Maimon et al.
patent: 2003/0216050 (2003-11-01), Golz et al.
patent: 2003/0230234 (2003-12-01), Nam et al.
patent: 2004/0000534 (2004-01-01), Lipinski
patent: 2004/0017989 (2004-01-01), So
patent: 2004/0018738 (2004-01-01), Liu
patent: 2004/0023475 (2004-02-01), Bonser et al.
patent: 2004/0023502 (2004-02-01), Tzou et al.
patent: 2004/0041189 (2004-03-01), Voshell et al.
patent: 2004/0043623 (2004-03-01), Liu et al.
patent: 2004/0053475 (2004-03-01), Sharma
patent: 2004/0079988 (2004-04-01), Harari
patent: 2004/0106257 (2004-06-01), Okamura et al.
patent: 2004/0235255 (2004-11-01), Tanaka et al.
patent: 2004/2035255 (2004-11-01), Tanaka
patent: 2005/0074949 (2005-04-01), Jung et al.
patent: 2005/0112886 (2005-05-01), Asakawa et al.
patent: 2005/0142497 (2005-06-01), Ryou
patent: 2005/0153562 (2005-07-01), Furukawa et al.
patent: 2005/0164454 (2005-07-01), Leslie
patent: 2005/0167394 (2005-08-01), Liu et al.
patent: 2005/0186705 (2005-08-01), Jackson et al.
patent: 2005/0272259 (2005-12-01), Hong
patent: 2006/0003182 (2006-01-01), Lane et al.
patent: 2006/0024940 (2006-02-01), Furukawa et al.
patent: 2006/0024945 (2006-02-01), Kim et al.
patent: 2006/0046161 (2006-03-01), Yin et al.
patent: 2006/0046200 (2006-03-01), Abatchev et al.
patent: 2006/0046201 (2006-03-01), Sandhu et al.
patent: 2006/0046422 (2006-03-01), Tran et al.
patent: 2006/0046484 (2006-03-01), Abatchev et al.
patent: 2006/0083996 (2006-04-01), Kim
patent: 2006/0172540 (2006-08-01), Marks et al.
patent: 2006/0189150 (2006-08-01), Jung
patent: 2006/0211260 (2006-09-01), Tran et al.
patent: 2006/0216923 (2006-09-01), Tran et al.
patent: 2006/0231900 (2006-10-01), Lee et al.
patent: 2006/0263699 (2006-11-01), Abatchev et al.
patent: 2006/0267075 (2006-11-01), Sandhu et al.
patent: 2006/0273456 (2006-12-01), Sant et al.
patent: 2006/0281266 (2006-12-01), Wells
patent: 2007/0026672 (2007-02-01), Tang et al.
patent: 2007/0045712 (2007-03-01), Haller et al.
patent: 2007/0048674 (2007-03-01), Wells
patent: 2007/0049011 (2007-03-01), Tran
patent: 2007/0049030 (2007-03-01), Sandhu et al.
patent: 2007/0049032 (2007-03-01), Abatchev et al.
patent: 2007/0049035 (2007-03-01), Tran
patent: 2007/0049040 (2007-03-01), Bai et al.
patent: 2007/0050748 (2007-03-01), Juengling
patent: 2007/0210449 (2007-09-01), Caspary et al.
patent: 2007/0215874 (2007-09-01), Furukawa et al.
patent: 2007/0215960 (2007-09-01), Zhu et al.
patent: 2007/0275309 (2007-11-01), Liu
patent: 2008/0054350 (2008-03-01), Breitwisch et al.
patent: 0227303 (1987-07-01), None
patent: 0491408 (1992-06-01), None
patent: 1357433 (2003-10-01), None
patent: 05343370 (1993-12-01), None
patent: H8-55908 (1996-02-01), None
patent: H8-55920 (1996-02-01), None
patent: 1999-0001440 (1999-01-01), None
patent: 1999-027887 (1999-04-01), None
patent: WO 94/15261 (1994-07-01), None
patent: WO 02/099864 (2002-12-01), None
patent: WO 2004/001799 (2003-12-01), None
patent: WO 2004/003977 (2004-01-01),

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