1989-11-21
1991-09-24
Hille, Rolf
357 236, 357 2311, 357 49, 357 55, H01L 2978
Patent
active
050517953
ABSTRACT:
An electrically-erasable, electrically-programmable ROM or an EEPROM is constructed using a floating-gate transistor with or without a split gate. The floating-gate transistor may have a self-aligned tunnel window of sublithographic dimension positioned on the opposite side of the source from the channel and drain, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. In this cell, the bitlines and source/drain regions are buried beneath relatively thick silicon oxide and the floating gate extends over the thick silicon oxide. Programming and erasing are accomplished by causing electrons to tunnel through the oxide in the tunnel window. The tunnel window has a thinner dielectric than the remainder of the oxides under the floating gate to allow Fowler-Nordheim tunneling. Trenches and ditches are used for electrical isolation between individual memory cells, allowing an increase in cell density.
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D'Arrigo Sebastiano
Gill Manzur
McElroy David J.
Brady III W. James
Hille Rolf
Lindgren Theodore D.
Loke Steven
Sharp Melvin
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