EEPROM flash memory cell, memory device, and process for formati

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257315, 257316, H01L 29788

Patent

active

058148574

ABSTRACT:
An EEPROM flash memory cell and a process for formation thereof are disclosed. The EEPROM flash memory cell includes: a source; a drain; a gate insulating layer disposed upon a channel between the source and the drain; a floating gate electrode disposed upon the gate insulating layer and facing toward the channel; and a control gate electrode disposed upon the floating gate electrode across an intermediate insulating layer; and further includes, an erasing electrode for contacting with at least one side of the floating gate electrode at least at one or more spots thereof across a tunneling insulating layer.

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