EEPROM and EEPROM manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S315000, C257S316000, C257S317000, C257S318000, C257S319000, C438S257000

Reexamination Certificate

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06914288

ABSTRACT:
A memory transistor of an EEPROM has a floating gate electrode of a shape such that it covers the entirety of a tunnel film and a channel region and does not cover a region between the channel region and an embedded layer. And, a control gate electrode is formed on an interlayer insulating film on the floating gate electrode into a shape such that it is wider than the floating gate electrode above the tunnel film, and is narrower than the floating gate electrode above the channel region.

REFERENCES:
patent: 4377857 (1983-03-01), Tickle
patent: 4477825 (1984-10-01), Yaron et al.
patent: 4794562 (1988-12-01), Kato et al.
patent: 6157058 (2000-12-01), Ogura
patent: 6291851 (2001-09-01), Matsumoto et al.
patent: 6323517 (2001-11-01), Park et al.
patent: A-59-205763 (1984-11-01), None
patent: A-61-181168 (1986-08-01), None
Lucero, et al., “A 16 kbit Smart 5 V-Only EEPROM with Redundancy,”IEEE Journal of Solid-State Circuits, vol. SC-18, No. 5, Oct. 1983, pp. 539-544.

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