Edge wheel assembly in a substrate processing brush box

Details Edge wheel assembly in a substrate processing brush box Edge wheel assembly in a substrate processing brush box

2005-06-21

2005-06-21

Warden, Sr., Robert J. (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S088200, C015S088300, C015S097100, C134S001000

Reexamination Certificate

active

06907637

ABSTRACT:
An edge wheel assembly for use in a semiconductor wafer fabrication brush box is provided. The edge wheel assembly is configured to support and to rotate a semiconductor wafer in a vertical orientation and includes an edge wheel assembly block having at least two pairs of edge wheel shaft bores. Edge wheels are attached to shafts extending through the edge wheel shaft bores, and a drive motor drives the shafts to rotate the edge wheels. The drive motor is coupled to the edge wheel assembly block with a plate which is designed to enable insertion of the edge wheel assembly into either one of a first side and a second side of the brush box. Component parts are designed to be configurable to a plurality of orientations and implementations.

REFERENCES:
patent: 5729856 (1998-03-01), Jang et al.
patent: 6012192 (2000-01-01), Sawada et al.
patent: 6070284 (2000-06-01), Garcia et al.
patent: 6186873 (2001-02-01), Becker et al.
patent: 6254688 (2001-07-01), Kobayashi et al.
patent: 6427566 (2002-08-01), Jones et al.

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