Edge grinding

Details Edge grinding Edge grinding

2005-04-19

2005-04-19

Hail, III, Joseph J. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S005000, C451S006000, C451S140000, C451S146000, C451S256000, C451S258000, C051S302000, C051S302000

Reexamination Certificate

active

06881130

ABSTRACT:
A method of positioning a grooved grinding wheel relative to a disc-like circular workpiece for edge grinding the workpiece using the groove in the wheel includes the steps of mounting the workpiece for rotation about a first axis, mounting the grinding wheel for rotation about a second parallel axis, effecting relative movement between the workpiece and the wheel to engage the rim of the wheel within the groove and performing a preliminary grind. The position of the wheel is axially adjusted in accordance with the measurements made on the profile of the rim produced by the preliminary grind, and the rim is ground again with a second preliminary grind with the grinding wheel located at the axially shifted position. The steps of grinding and measuring the periphery of the workpiece are repeated until the rim profile possesses the desired accuracy. The final position of the grooved grinding wheel is then utilized for grinding future wafers.

REFERENCES:
patent: 5185965 (1993-02-01), Ozaki
patent: 5271185 (1993-12-01), Hosokawa
patent: 5289661 (1994-03-01), Jones et al.
patent: 6220938 (2001-04-01), Stocker et al.
patent: 6267647 (2001-07-01), Stocker et al.
patent: 6428397 (2002-08-01), Stocker

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