Edge-based proximity correction

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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Details

C716S030000, C716S030000, C703S002000

Reexamination Certificate

active

11139390

ABSTRACT:
One embodiment of the present invention provides a system that calculates an edge-based proximity correction which is applied to a region in the proximity of an evaluation point. During operation the system receives a layout. Next, the system decomposes polygons in the layout into edges. The system then computes the edge-based proximity correction based on the contributions of the edges. Specifically, the system computes contributions of the edges by: representing an edge as a difference between a first line-segment and a second line-segment which overlap at all points except for the points on the edge; determining a first pre-computed value that represents the first line-segment's contribution to the edge-based proximity correction; determining a second pre-computed value that represents the second line-segment's contribution to the edge-based proximity correction; and determining the contribution of the edge based on the difference between the first pre-computed value and the second pre-computed value.

REFERENCES:
patent: 6077310 (2000-06-01), Yamamoto et al.
patent: 6243855 (2001-06-01), Kobayashi et al.
patent: 6668367 (2003-12-01), Cobb et al.
patent: 6763514 (2004-07-01), Zhang
patent: 6817003 (2004-11-01), Lippincott et al.
patent: 6868175 (2005-03-01), Yamamoto et al.
patent: 7003756 (2006-02-01), Zhang
patent: 7010776 (2006-03-01), Gallatin et al.
patent: 7024638 (2006-04-01), Scheffer et al.
patent: 7024655 (2006-04-01), Cobb
patent: 2003/0061587 (2003-03-01), Zhang et al.

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