Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-10-17
2006-10-17
Smoot, Stephen W. (Department: 2813)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S687000, C438S694000
Reexamination Certificate
active
07122473
ABSTRACT:
The present invention provides at least one nozzle that sprays a rotating workpiece with an etchant at an edge thereof. The at least one nozzle is located in an upper chamber of a vertically configured processing subsystem that also includes mechanisms for plating, cleaning and drying in upper and lower chambers.
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Ashjaee Jalal
Basol Bulent M.
Talieh Homayoun
Uzoh Cyprian E.
Volodarsky Rimma
ASM Nutool, Inc.
Knobbe Martens Olson & Bear LLP
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