E-manufacturing in semiconductor and microelectronics processes

Details E-manufacturing in semiconductor and microelectronics processes E-manufacturing in semiconductor and microelectronics processes

2007-07-10

2007-07-10

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S097000, C700S104000, C700S109000

Reexamination Certificate

active

10972643

ABSTRACT:
Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics process operates according to process conditions to output a product, which manufacturing component at least one of monitors and controls the process using modularized code. A rules engine component processes one or more rules in association with the modularized code to control the process conditions in realtime by balancing process efficiency criteria to arrive at an optimal result.

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