4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Frank Y. H. Fan

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Apparatus and methods of controlling surface charge and focus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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E-beam detection of defective contacts/vias with flooding...

Radiant energy – Electron energy analysis
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Method and apparatus for reviewing voltage contrast defects...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2760217

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