Dynamically balanced substrate carrier handler

Details Dynamically balanced substrate carrier handler Dynamically balanced substrate carrier handler

2007-01-30

2007-01-30

Bidwell, James R. (Department: 3651)

Conveyors: power-driven

Conveyor system for moving a specific load as a separate unit

System includes an oscillating or reciprocating load...

C198S468010, C198S468600

Reexamination Certificate

active

10988190

ABSTRACT:
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.

REFERENCES:
patent: 4566118 (1986-01-01), Chaplin et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4714600 (1987-12-01), Driscoll et al.
patent: 4811522 (1989-03-01), Gill, Jr.
patent: 5170433 (1992-12-01), Elliott et al.
patent: 5233540 (1993-08-01), Andersson et al.
patent: 5710720 (1998-01-01), Algrain et al.
patent: 5844664 (1998-12-01), Van Kimmenade et al.
patent: 5895192 (1999-04-01), Parnell et al.
patent: 6144118 (2000-11-01), Cahill et al.
patent: 6256869 (2001-07-01), Asai et al.
patent: 6382400 (2002-05-01), Hofele et al.
patent: 2002/0093637 (2002-07-01), Yuan et al.
patent: 2002/0104950 (2002-08-01), Mayama
patent: 0 766 288 (1997-04-01), None
patent: 61107211 (1986-05-01), None
patent: 03263810 (1991-11-01), None
patent: 08326835 (1996-12-01), None
patent: 10077940 (1998-03-01), None
patent: 11224644 (1999-08-01), None
patent: 2000068350 (2000-03-01), None
patent: 2001308112 (2001-11-01), None
patent: WO 96/38766 (1996-12-01), None
Weiss, Mitchell, “Evaluating 300-mm Fab Automation Technology Options and Selection Criteria”, Jun. 1997, MICRO, vol. 15, No. 6, pp. 65-66, 68, 70, 72, 74, 76, 78-79.
No-Author, “Equipe Helps Streamline 300 mm Wafer Processing”, Dec. 1, 1997, Manufacturing Automation, vol. 7, No. 3, p. 1-5.
No-Author, “PRI Selected By Varian Semiconductor to Supply 300mm Integrated Front-End Buffering Solutions”, Feb. 10, 2000, Newswire, p. 7434.
No-Author, “300mm Single-Wafer Handling” (Brief Article), Apr. 1, 2000, Solid State Technology, vol. 43, No. 4, p. 99.

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