Dynamic imaging microellipsometry

Details Dynamic imaging microellipsometry Dynamic imaging microellipsometry

1989-03-16

1991-12-31

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

Of surface reflection

250225, G01N 2121, G01J 404

Patent

active

050766961

ABSTRACT:
Dynamic imaging microellipsometry (DIM) is a rapid full-field imaging technique for high resolution studies of thin-films. The DIM concept is based on radiometric polarizer, compensator, specimen, analyzer (PCSA) ellipsometry combined with video and image processing techniques. The theoretical basis for this approach is developed using the Jones vector and matrix formalism. Basic systems design is presented with error model predictions of ellipsometric accuracies better than 0.1.degree. for full-field .psi. and .DELTA. images captured in a few seconds with spatial resolution under 10 microns.

REFERENCES:
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Ralph F. Cohn, "Dynamic Imaging Microellipsometry", Journal of the Electrochemical Society, Apr. 1988, pp. 1033 and 1034.
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