Dynamic fault imaging system using electron beam and method of a

Details Dynamic fault imaging system using electron beam and method of a Dynamic fault imaging system using electron beam and method of a

1995-03-03

1996-08-20

Nguyen, Vinh P.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324750, 324751, G01R 3128

Patent

active

055482112

ABSTRACT:
A dynamic fault analyzing system discontinuously radiates an electron beam onto a semiconductor integrated circuit device applied with a test pattern for monitoring a secondary electron beam produced in the semiconductor integrated circuit device, and the intensity of the secondary electron beam is varied depending upon combination of voltage level and topography of a wiring pattern incorporated in the semiconductor integrated circuit device, wherein a fault is detectable from discrepancy between variation of the secondary electron beam produced in a defective product and variation of the secondary electron beam produced in an excellent product; however, the variation of the secondary electron beam contains topographic information, and the failure origin is easily specified on an image produced on the basis of the topographic information.

REFERENCES:
patent: 4358732 (1982-11-01), Johnston et al.
patent: 4644584 (1987-02-01), Nagashima et al.
patent: 4692690 (1987-09-01), Hara et al.
patent: 4706019 (1987-11-01), Richardson
patent: 4721909 (1988-01-01), Richardson
patent: 4745362 (1988-05-01), Brust
patent: 4803357 (1989-02-01), Brust
patent: 4805123 (1989-02-01), Specht et al.
patent: 4820977 (1989-04-01), Brust
patent: 4853622 (1989-08-01), Brust
patent: 4870344 (1989-09-01), Stille
patent: 4870357 (1989-09-01), Young et al.
patent: 4965515 (1990-10-01), Karasawa
patent: 4978908 (1990-12-01), Mahart-Shetti et al.
patent: 5054097 (1991-10-01), Flinois et al.
Journal of Vacuum Science and Technology: Part B, vol. 8, No. 6, Nov. 1990, New York US, pp. 2037-2040, Radzimsky et al, "Electron beam testing of integrated circuits with multilevel metal".

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