Image analysis – Applications – Manufacturing or product inspection
Patent
1997-10-10
2000-02-01
Mancuso, Joseph
Image analysis
Applications
Manufacturing or product inspection
382280, G06K 900
Patent
active
060212152
ABSTRACT:
A data visualization method and apparatus permit the representation of multi-dimensional input data sequences as output sequences of closed form visual representations known as blobs. By noting changes in the shape of blobs as processing of the input sequence progresses, changes in characteristics of entities represented by the input sequence can be readily ascertained by observation. In an illustrative embodiment, a plasma etching process used in semiconductor fabrication can be observed and controlled by monitoring changes in blobs corresponding to the etching process variables.
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Kornblit Avinoam
Layadi Nacer
Lee Tseng-Chung
Rietman Edward Alois
Bali Vikkram
Lucent Technologies - Inc.
Mancuso Joseph
Ryan William
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