Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-12-12
2006-12-12
Chu, John S. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S905000, C430S910000, C430S926000
Reexamination Certificate
active
07147983
ABSTRACT:
The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.
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Paul et al., “An anthracene-containing PMMA derivative for photoresist and channel waveguide applications”,Thin Solid Films; vol. 288 (1996) pp. 150-154.
Adams Timothy G.
Bell Rosemary
doCanto Manuel
Miller-Fahey Robin L.
Mori James Michael
Chu John S.
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Frickey Darryl P.
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