DUV-capable microscope objective with parfocal IR focus

Details DUV-capable microscope objective with parfocal IR focus DUV-capable microscope objective with parfocal IR focus

2006-05-23

2006-05-23

Chang, Audrey (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Lens, lens system or component

C359S355000, C359S350000, C359S656000, C359S357000

Reexamination Certificate

active

07050223

ABSTRACT:
A DUV-capable dry objective for microscopes comprises lens groups made of quartz glass, fluorite, and in some cases also lithium fluoride. It possesses a DUV focus for a DUV wavelength region λDUV±Δλ, where Δλ=8 nm, and additionally a parfocal IR focus for an IR wavelength λIR, where 760 nm≧λIR≧920 nm. For that purpose, the penultimate element is of concave configuration on both sides, and its object-side outer radius is much smaller than its image-side outer radius. The DUV objective is IR autofocus-capable.

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Optics (Hecht and Zajac, Addision and Wesley, 1979, pp. 186-191).

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