Dual-wavelength x-ray monochromator

Details Dual-wavelength x-ray monochromator Dual-wavelength x-ray monochromator

2005-06-14

2005-06-14

Church, Craig E. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S085000, C378S082000

Reexamination Certificate

active

06907108

ABSTRACT:
A method for testing a surface includes finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths. The first and second critical angles are compared to determine an orientation of a tangent to the surface in the area.

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Wiener, et al., “Characterization of Titanium Nitride Layers by Grazing-Emission X-Ray Fluorescence Spectrometry”, Applied Surface Science 125 (1998), pp. 129-136.

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