Dual surface reflector

Details Dual surface reflector Dual surface reflector

1998-10-30

2000-08-22

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

392416, 392411, 392422, 219405, 118725, H01L 21205

Patent

active

061084913

ABSTRACT:
A dual surfaced mid-reflector employs two independently shaped faceted faces to direct radiant energy from separate heater lamp arrays to a substrate or substrate support to be heated. A dual surfaced mid-reflector can also be employed in conjunction with a peripheral cylindical reflect or and a central cylindrical reflector to further direct radiation to specific regions on a substrate or substrate support. In addition, a dual surfaced mid-reflector can also be employed in conjunction with heater lamps where the radiation of individual lamps is further directed by focusing reflectors or dispersive reflectors.

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